Wet Oxidation System For VCSEL Fabrication

VIXEL-320 - California Scientific, Inc. (CSI)

The VIXEL-320 is a wet oxidation system intended for the fabrication of Vertical Cavity Surface Emitting Lasers. It is an atmospheric-pressure oxidation system with in-situ monitoring of oxide aperture formation. It accommodates single wafers of up to 150mm (6") in diameter.

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Topics

Systems
VCSEL
Vertical Cavity Surface Emitting Lasers
Laser Systems
Lasers
Monitoring
Wafer